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XYZ positioning system for high precision automated optical inspection | ball screw, cross roller, DC motor, linear measuring system Highly stable non-contact optical ...
... accuracy • world's most precise nanopositioning and nanometrology machine • measuring and positioning range 25 x 25 x 5 mm • resolution 0.1 nm • highest accuracy 3D positioning and ...
... interferometric measurement and positioning system for AFM • 2.5 D positioning and measuring system of highest accuracy • measurement and positioning range: surface Ø 100 mm • lateral measurement resolution ...
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