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- Actuator and Positioning System >
- Clean room micro-positioning system
Clean room micro-positioning systems
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Load: 10 kg
Stroke: 300 mm
Speed: 1 m/s
XY TABLE WITH LINEAR MOTORS ROTARY TABLE DDR DIRECT DRIVE ROTARY XY travel 300x300 mm Rotation unlimited Absolute encoders Linear resolution 0.1 micron Rotary resolution 0.25 arc-sec
... applications in high vacuum and ultra-high vacuum. Optionally equipped with a nanomotion, it is particularly suitable for highly dynamic and high-precision positioning. Application areas Precision ...
Steinmeyer Mechatronik GmbH
... with high-resolution measuring system for repeatability up to 0.005 µm • Combinable with rotary stages for rotary applications • Individual adaptation to the installation situation in the chamber • ...
Steinmeyer Mechatronik GmbH
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