Clean room positioning systems

Repeatability: 0.02 mm - 0.1 mm
Load: 3 kg - 120 kg
Speed: 100 mm/s - 4,000 mm/s

Linear Motion XYZ Stage Gantry Robot Multi-axis Positioning Guide System Belt Driven Actuator Ball Screw Module, Belt Driven Linear Guide, Positioning Stage, Motion ...

XYZ Stage Multi-axis Positioning Table Linear Gantry System Cartesian Robot Technical Feature FSL40 linear guide is aluminum profile, body width ...

... Max Speed: 255mm/s Max Load: 25kg Ball Screw: G1204/G1605/G1610 Ball Screw Module, Belt Driven Linear Guide, Positioning Stage, Motion Controller for Cartesian Robot. CE, FCC, RoHS, ISO9001 Certification. Huge ...

Repeatability: 1 µm
Load: 15 kg
Stroke: 200 mm - 1,000 mm

... Versions for clean room ISO 14644-1 (up to class 1 on request) - Rack, vibration isolation, enclosure, safety concept - Extension of degrees of freedom for XYZ-Rx-Ry-Rz motions - Individual solution ...

Repeatability: 0.3 µm - 2.5 µm
Load: 5 kg - 20 kg
Stroke: 100 mm - 720 mm

... simultaneously This inspection system consists of four clean room axes and allows the automated measurement of multiple objects simultaneously. High dynamics and highest reproducibility ...

Repeatability: 1.9 µm - 4.4 µm
Load: 50 kg
Stroke: 100 mm - 1,000 mm

... cycles and a maintenance interval of 500,000 full cycles resp. every 2 years This positioning system moves a vacuum chuck on an area of 1000 x 1000 mm. The standard system ...

Repeatability: 5 µm
Load: 30 kg
Stroke: 300 mm

Open-frame XY stages designed with a low profile for a wide range of automated accurate positioning in microscope-based applications. The drive mechanism located on the side of the unit and offers a clear ...

... process control applications such as thin film metrology, critical dimensions, etc. Characteristics - Infinite rotation - Built-in vacuum supply at wafer chuck level - Built-in gravity compensator - ...