Clean room positioning systems

6 companies | 26 products
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gantry positioning system
gantry positioning system
FPB60FBL80IS-M

Repeatability: 0.02 mm - 0.1 mm
Load: 3 kg - 120 kg
Speed: 100 mm/s - 4,000 mm/s

Linear Motion XYZ Stage Gantry Robot Multi-axis Positioning Guide System Belt Driven Actuator Ball Screw Module, Belt Driven Linear Guide, Positioning Stage, Motion ...

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FUYU Technology
multi-axis positioning system
multi-axis positioning system
FSK40G-L

XYZ Stage Multi-axis Positioning Table Linear Gantry System Cartesian Robot Technical Feature FSL40 linear guide is aluminum profile, body width ...

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FUYU Technology
multi-axis positioning system
multi-axis positioning system
FTL40-H1

... Max Speed: 255mm/s Max Load: 25kg Ball Screw: G1204/G1605/G1610 Ball Screw Module, Belt Driven Linear Guide, Positioning Stage, Motion Controller for Cartesian Robot. CE, FCC, RoHS, ISO9001 Certification. Huge ...

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FUYU Technology
multi-axis positioning system
multi-axis positioning system
782300:150.26

Repeatability: 1 µm
Load: 15 kg
Stroke: 200 mm - 1,000 mm

... Versions for clean room ISO 14644-1 (up to class 1 on request) - Rack, vibration isolation, enclosure, safety concept - Extension of degrees of freedom for XYZ-Rx-Ry-Rz motions - Individual solution ...

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Steinmeyer Holding GmbH
multi-axis positioning system
multi-axis positioning system
782430:002.26

Repeatability: 0.3 µm - 2.5 µm
Load: 5 kg - 20 kg
Stroke: 100 mm - 720 mm

... simultaneously This inspection system consists of four clean room axes and allows the automated measurement of multiple objects simultaneously. High dynamics and highest reproducibility ...

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Steinmeyer Holding GmbH
XYZ positioning system
XYZ positioning system
782300:179.26

Repeatability: 1.9 µm - 4.4 µm
Load: 50 kg
Stroke: 100 mm - 1,000 mm

... cycles and a maintenance interval of 500,000 full cycles resp. every 2 years This positioning system moves a vacuum chuck on an area of 1000 x 1000 mm. The standard system ...

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Steinmeyer Holding GmbH
stacked architecture positioning system
stacked architecture positioning system
CHARON2HD

Repeatability: 1 µm
Load: 30 kg
Stroke: 365, 355, 475, 410 mm

... predefined configuration ranging from single X axis to complete 6 degree-of-freedom (DOF) motion system. The choice from our standard electronics makes the CHARON2HD system scalable in performance to ...

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ETEL S.A.
stacked architecture positioning system
stacked architecture positioning system
VULCANO2

Repeatability: 1.5 µm
Load: 80 kg
Stroke: 365 mm

... degrees of freedom Built-in vacuum supply and customer signal cables at chuck level Here are the key features Nanometer position stability Ensures precise positioning accuracy over extended ...

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ETEL S.A.
combined modules positioning system
combined modules positioning system
ZT

Repeatability: 0.25, 1, 0.3, 2 µm
Load: 1 kg
Stroke: 12, 4 mm

... rotation for versatile positioning. Built-in Vacuum Supply Integrated vacuum channel at wafer chuck interface. Gravity Compensator minimize power dissipation, enhance accuracy. Clean ...

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ETEL S.A.
large aperture positioning system
large aperture positioning system
XY-OF-S300x300-A300x300J

Repeatability: 5 µm
Load: 30 kg
Stroke: 300 mm

Open-frame XY stages designed with a low profile for a wide range of automated accurate positioning in microscope-based applications. The drive mechanism located on the side of the unit and offers a clear ...

wafer inspection and metrology positioning system
wafer inspection and metrology positioning system
782430:002.26

Repeatability: 0.3, 0.5 mm
Stroke: 100, 820 mm
Speed: 150, 750 mm/s

... • Low-maintenance 24/7 operation and flexible maintenance concept due to fast system exchange on the granite structure Optionally expandable: • Version for clean room ISO 14644-1 ...

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Steinmeyer Mechatronik GmbH
wafer inspection and metrology positioning system
wafer inspection and metrology positioning system
KT470-SM

Repeatability: 3.3, 2.3 µm
Stroke: 200, 305 mm
Speed: 20 mm/s

This inspection system consists of the XY-Stage KT470 on a granite structure with a manual Z-vertical unit. This combination is suitable for the flexible and modular design of production systems / inline ...

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