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- Clean room positioning system
Clean room positioning systems
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Repeatability: 0.02 mm - 0.1 mm
Load: 3 kg - 120 kg
Speed: 100 mm/s - 4,000 mm/s
Linear Motion XYZ Stage Gantry Robot Multi-axis Positioning Guide System Belt Driven Actuator Ball Screw Module, Belt Driven Linear Guide, Positioning Stage, Motion ...
FUYU Technology
XYZ Stage Multi-axis Positioning Table Linear Gantry System Cartesian Robot Technical Feature FSL40 linear guide is aluminum profile, body width ...
FUYU Technology
... Max Speed: 255mm/s Max Load: 25kg Ball Screw: G1204/G1605/G1610 Ball Screw Module, Belt Driven Linear Guide, Positioning Stage, Motion Controller for Cartesian Robot. CE, FCC, RoHS, ISO9001 Certification. Huge ...
FUYU Technology
Repeatability: 1 µm
Load: 15 kg
Stroke: 200 mm - 1,000 mm
... Versions for clean room ISO 14644-1 (up to class 1 on request) - Rack, vibration isolation, enclosure, safety concept - Extension of degrees of freedom for XYZ-Rx-Ry-Rz motions - Individual solution ...
Steinmeyer Holding GmbH
Repeatability: 0.3 µm - 2.5 µm
Load: 5 kg - 20 kg
Stroke: 100 mm - 720 mm
... simultaneously This inspection system consists of four clean room axes and allows the automated measurement of multiple objects simultaneously. High dynamics and highest reproducibility ...
Steinmeyer Holding GmbH
Repeatability: 1.9 µm - 4.4 µm
Load: 50 kg
Stroke: 100 mm - 1,000 mm
... cycles and a maintenance interval of 500,000 full cycles resp. every 2 years This positioning system moves a vacuum chuck on an area of 1000 x 1000 mm. The standard system ...
Steinmeyer Holding GmbH
Repeatability: 1 µm
Load: 30 kg
Stroke: 365, 355, 475, 410 mm
... predefined configuration ranging from single X axis to complete 6 degree-of-freedom (DOF) motion system. The choice from our standard electronics makes the CHARON2HD system scalable in performance to ...
ETEL S.A.
Repeatability: 1.5 µm
Load: 80 kg
Stroke: 365 mm
... degrees of freedom Built-in vacuum supply and customer signal cables at chuck level Here are the key features Nanometer position stability Ensures precise positioning accuracy over extended ...
ETEL S.A.
Repeatability: 0.25, 1, 0.3, 2 µm
Load: 1 kg
Stroke: 12, 4 mm
... rotation for versatile positioning. Built-in Vacuum Supply Integrated vacuum channel at wafer chuck interface. Gravity Compensator minimize power dissipation, enhance accuracy. Clean ...
ETEL S.A.
Repeatability: 5 µm
Load: 30 kg
Stroke: 300 mm
Open-frame XY stages designed with a low profile for a wide range of automated accurate positioning in microscope-based applications. The drive mechanism located on the side of the unit and offers a clear ...
Repeatability: 0.3, 0.5 mm
Stroke: 100, 820 mm
Speed: 150, 750 mm/s
... • Low-maintenance 24/7 operation and flexible maintenance concept due to fast system exchange on the granite structure Optionally expandable: • Version for clean room ISO 14644-1 ...
Steinmeyer Mechatronik GmbH
Repeatability: 3.3, 2.3 µm
Stroke: 200, 305 mm
Speed: 20 mm/s
This inspection system consists of the XY-Stage KT470 on a granite structure with a manual Z-vertical unit. This combination is suitable for the flexible and modular design of production systems / inline ...
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