Compressor vacuum pumps

Turbomolecular vacuum pumps can attain pressure levels from 10-12 mbar. The flow rates vary from 50 l to 5,000 l/s. They operate on the same principle as compressors. The blades of the different levels of the pump are rotated by an electric motor rotating at a high speed which removes the air from the volume to be emptied. These pumps are often mounted on magnetic bearings to support high rotational speeds. They require a primary pump with a vacuum limit of...