Helium vacuum pumps

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3 companies | 6 products
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screw vacuum pump
screw vacuum pump
COBRA NS 0070 C

Ultimate vacuum: 0.03 mbar
Flow rate: 85, 70 m³/h
Power: 4, 4.4 kW

Leak-Tight Vacuum Generation for Demanding Processes High performance Advanced screw design, patented self-balancing screws, perfectly suited for coating applications, helium pumping or fluorination Efficient Low ...

screw vacuum pump
screw vacuum pump
COBRA NS 0160 C

Ultimate vacuum: 0.03 mbar
Flow rate: 160, 135 m³/h
Power: 6.6, 5.5 W

Leak-Tight Vacuum Generation for Demanding Processes High performance Advanced screw design, patented self-balancing screws, perfectly suited for coating applications, helium pumping or fluorination Efficient Low ...

screw vacuum pump
screw vacuum pump
COBRA NS 0600 C

Ultimate vacuum: 0.01 mbar
Flow rate: 600 m³/h
Power: 15 kW

Leak-Tight Vacuum Generation for Demanding Processes High performance Advanced screw design, patented self-balancing screws, perfectly suited for coating applications, helium pumping or fluorination Efficient Low ...

rotary vane vacuum pump
rotary vane vacuum pump
LR/HR/UR series

Flow rate: 62 m³/h - 701 m³/h

... all pump stages making this series pump optimal for CVD and etch applications. ULVAC's ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes ...

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ULVAC GmbH
rotary vane vacuum pump
rotary vane vacuum pump
GHD-031

Ultimate vacuum: 0.01 mbar
Flow rate: 1.8, 2.16 m³/h

OIL SEALED ROTARY VACUUM PUMP GHD-031 Wide range voltage motor and correspond to CE, cTUVus. Magnet coupling for no oil leakage from shaft seal and realized longer lifetime. Integrated check valve below ...

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ULVAC GmbH
scroll vacuum pump
scroll vacuum pump
BL531

Flow rate: 100 l/min
Power: 20 W
Operating temperature: -40 °C - 50 °C

... Integrated Air For CNC and CMM • Nitrogen, Helium, Natural Gas, CO2, • Gas Pressure Boosters • High and Low Vacuum Pumps • Steam Expansion and Recompression • Medical Air, Vacuum ...

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