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Helium vacuum pumps
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Ultimate vacuum: 0.03 mbar
Flow rate: 85, 70 m³/h
Power: 4, 4.4 kW
Leak-Tight Vacuum Generation for Demanding Processes High performance Advanced screw design, patented self-balancing screws, perfectly suited for coating applications, helium pumping or fluorination Efficient Low ...
Ultimate vacuum: 0.03 mbar
Flow rate: 160, 135 m³/h
Power: 6.6, 5.5 W
Leak-Tight Vacuum Generation for Demanding Processes High performance Advanced screw design, patented self-balancing screws, perfectly suited for coating applications, helium pumping or fluorination Efficient Low ...
Ultimate vacuum: 0.01 mbar
Flow rate: 600 m³/h
Power: 15 kW
Leak-Tight Vacuum Generation for Demanding Processes High performance Advanced screw design, patented self-balancing screws, perfectly suited for coating applications, helium pumping or fluorination Efficient Low ...
Flow rate: 62 m³/h - 701 m³/h
... all pump stages making this series pump optimal for CVD and etch applications. ULVAC's ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes ...
ULVAC GmbH
Ultimate vacuum: 0.01 mbar
Flow rate: 1.8, 2.16 m³/h
OIL SEALED ROTARY VACUUM PUMP GHD-031 Wide range voltage motor and correspond to CE, cTUVus. Magnet coupling for no oil leakage from shaft seal and realized longer lifetime. Integrated check valve below ...
ULVAC GmbH
Flow rate: 100 l/min
Power: 20 W
Operating temperature: -40 °C - 50 °C
... Integrated Air For CNC and CMM • Nitrogen, Helium, Natural Gas, CO2, • Gas Pressure Boosters • High and Low Vacuum Pumps • Steam Expansion and Recompression • Medical Air, Vacuum ...
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