High-resolution positioning systems

Repeatability: 1 µm
Load: 15 kg
Stroke: 200 mm - 1,000 mm

... highly dynamic applications Customizable • Ideal for high precision and dynamic applications • Very large travel range of 1300 x 800 mm • High accelerations and speeds combined ...

Repeatability: 0.3 µm - 2.5 µm
Load: 5 kg - 20 kg
Stroke: 100 mm - 720 mm

... Very large travel range of 2 x 720 x 720 x 100 mm each • Allows the integration of two processes simultaneously This inspection system consists of four clean room axes and allows the automated measurement ...

Repeatability: 0.005 µm - 4.4 µm
Load: 5 kg - 25 kg
Stroke: 100 mm - 365 mm

8-axis positioning system / goniometer Customizable • Automated 8-axis inspection from different angles • Coaxial rotation system that pivots cameras / sensors / ...

Repeatability: 2 µm
Stroke: 65 mm
Speed: 25 mm/s

... Laboratory Analytics System with holder for sensor and XY stage with aperture Customizable: • Ideal for set-up and expansion of high-resolution analysis, scanning, ...

Repeatability: 0.3 µm - 0.7 µm
Stroke: 200 mm
Speed: 15 mm/s - 25 mm/s

... Inspection Station for high resolution Customizable: • Ideal for sample inspection • High precision repeatability up to 0.3 µm • Reduction of measurement deviations to less than ...

Repeatability: 0.002 µm - 2.4 µm
Stroke: 135 mm
Speed: 10 mm/s - 50 mm/s

... • High repeatability up to 0.0017 • Moves 1.9 µm precisely with X into the measuring position This X-Phi positioning system consists of high-precision and durable ...

Repeatability: 0.3 µm - 1.7 µm
Stroke: 100 mm - 300 mm
Speed: 25 mm/s

XYZ system for inspection and quality control Customizable: • Very high runout accuracy and repeatability up to 0.3 µm • Positioning of loads up to 150 N with a ...

Repeatability: 0.5 µm - 1.5 µm
Stroke: 50, 150, 300 mm
Speed: 25 mm/s

XYZ System for Laboratory and Wafer Inspection Customizable: • Ideal for setting up and expanding of your application • Highly precise repeatability up to 0.5 µm • Smallest steps and highest reliability at comparatively ...

Repeatability: 0.4 µm - 2.2 µm
Stroke: 100 mm - 300 mm
Speed: 1.12 mm/s - 25 mm/s

XZ System für Labor- und Waferinspektion Customizable: • Ideal for setting up and expanding of your application • Highly precise repeatability up to 0.4 µm • Smallest steps and highest reliability at comparatively ...

Repeatability: 0.3 µm - 0.5 µm
Stroke: 50 mm
Speed: 30 m/s

XYZ positioning system for laboratory inspection Customizable: • Ideal for setting up and expanding your high-precision measurement technology • Very high repeatability ...

... cryostat in the customer setup. When designing high-resolution positioning systems that need to operate accurately at cryogenic temperatures, it is important to ensure ...

Repeatability: 5 µm
Load: 30 kg
Stroke: 300 mm

Open-frame XY stages designed with a low profile for a wide range of automated accurate positioning in microscope-based applications. The drive mechanism located on the side of the unit and offers a clear ...