Motorized nanopositioning stages

Stroke : 100, 200, 300 mm
Speed: 5 mm/s
Repeatability: 0.015 µm - 0.02 µm

LA97 - Vacuum linear stages and axes Nanometer linear stage HV / UHV up to 10E-11, 100 - 300 mm travel, 0.02 µm repeatability, up to 10 kg load • Vacuum: all areas HV / UHV up to 10E-11 mbar • ...

Stroke : 100 µm
Load: 21 g

- Parallel-kinematic design for the highest stiffness in all spatial directions - Highly dynamic motion due to high resonant frequencies even with loads up to 100 g - Innovative product design for flexible use due to single mounting ...

Stroke : 25, 100, 75, 50 mm
Speed: 145, 500 mm/s
Repeatability: 75 nm

Our second-generation ANT95L linear stages are the leading solution for addressing your nanometer-level motion and positioning needs. Available in a variety of configurations, they’re best-in-class in combining resolution, ...

Stroke : 0.4, 0.2, 0.1 mm

... low as 0.2 nm, the NPX Piezo Stack linear stage make ultra-fine adjustments with resolution only limited by the noise of the control electronics. Large Piezoelectric Travel Range NPX Piezo Stack linear stages ...

IKO Nano Linear NT is a compact linear motor table with excellent functionalities, such as a magnet and optical linear encoder scale in the steel moving table part, and a stator coil and an optical linear encoder head in the steel bed. ...

Stroke : max 16.0 µm

The PXY Series by Piezosystem Jena is an XY nanopositioning stage which is used to compromised piezo electric actuators into a flexure hinges systems. With these assembly, it enables the unit to work ...

Stroke : 1 mm

DSM’s nanopositioning piezoelectric ZSA-1000C stage features flexure-guided motion over a 1mm vertical travel range for scanning, metrology, and inspection processes. The stable and stiff kinematic design ...