Multi-axis piezoelectric actuators

Stroke : 1 µm
Force: 10 N - 150 N

... displacement for shear actuators is ±0.02 % of the actuators length and ±0.01 % for longitudinal piezo actuators. This value is ten times lower when compared to piezo ...

Stroke : 1, 3, 5, 10 µm
Force: 20 N - 300 N

Compact Multi-Axis Actuators • Single and multi-axis versions • Travel ranges to 10 × 10 × 10 µm • Extreme reliability: >109 cycles • Picometer ...

Stroke : 1, 3 µm
Force: 20 N - 50 N

... and UHV environments to 10-9 hPa. Lateral displacement is based on the piezoelectric shear effect. Excellent dynamics with minimum electric power requirement. Variants for multi-axis ...

Stroke : 3, 5, 10 µm
Force: 20 N - 200 N

Compact Multi-Axis Actuators with Inner Hole • Single and multi-axis versions • Travel ranges to 10 × 10 × 10 µm • Extreme reliability: >109 cycles • ...