Plasma vacuum pumps

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turbomolecular vacuum pump
turbomolecular vacuum pump
iXL

Ultimate vacuum: 0.01 mbar
Flow rate: 110 m³/h

... energy compact dry pumps for light duty applications such as wafer handling, PVD, and metrology. Fast chamber pump down and extremely low power usage The iXL600(N) and iXL1000(N) ...

screw vacuum pump
screw vacuum pump
COBRA DS 0080 G

Ultimate vacuum: 0.03 mbar
Flow rate: 85, 70 m³/h
Power: 4, 2.6, 4.4, 3.2 kW

The New Generation of Dry Vacuum Pumps for Demanding Processes High performance Advanced screw design, excellent running qualities, perfectly suited for chemical vapor deposition, rapid thermal ...

screw vacuum pump
screw vacuum pump
COBRA DS 0160 G

Ultimate vacuum: 0.03 mbar
Flow rate: 160, 140 m³/h
Power: 6.6, 5.2, 5.5, 4.3 kW

The New Generation of Dry Vacuum Pumps for Demanding Processes High performance Advanced screw design, excellent running qualities, perfectly suited for chemical vapor deposition, rapid thermal ...

screw vacuum pump
screw vacuum pump
COBRA DS 0600 E

Ultimate vacuum: 0.01 mbar
Flow rate: 600 m³/h
Power: 15, 9 kW

The New Generation of Dry Vacuum Pumps for Demanding Processes High performance Advanced screw design, excellent running qualities, perfectly suited for chemical vapor deposition, rapid thermal ...

screw vacuum pump
screw vacuum pump
MS

Ultimate vacuum: 0.6 Pa
Flow rate: 4 l/min
Power: 2.4 kW

DRY VACUUM PUMP MS SERIES MS series is a vacuum pump which is categorized as screw type dry vacuum pump. Corrosion resistance and ...

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