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- Plasma vacuum pump
Plasma vacuum pumps
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Ultimate vacuum: 0.01 mbar
Flow rate: 110 m³/h
... energy compact dry pumps for light duty applications such as wafer handling, PVD, and metrology. Fast chamber pump down and extremely low power usage The iXL600(N) and iXL1000(N) ...
Ultimate vacuum: 0.03 mbar
Flow rate: 85, 70 m³/h
Power: 4, 2.6, 4.4, 3.2 kW
The New Generation of Dry Vacuum Pumps for Demanding Processes High performance Advanced screw design, excellent running qualities, perfectly suited for chemical vapor deposition, rapid thermal ...
Ultimate vacuum: 0.03 mbar
Flow rate: 160, 140 m³/h
Power: 6.6, 5.2, 5.5, 4.3 kW
The New Generation of Dry Vacuum Pumps for Demanding Processes High performance Advanced screw design, excellent running qualities, perfectly suited for chemical vapor deposition, rapid thermal ...
Ultimate vacuum: 0.01 mbar
Flow rate: 600 m³/h
Power: 15, 9 kW
The New Generation of Dry Vacuum Pumps for Demanding Processes High performance Advanced screw design, excellent running qualities, perfectly suited for chemical vapor deposition, rapid thermal ...
Ultimate vacuum: 0.6 Pa
Flow rate: 4 l/min
Power: 2.4 kW
DRY VACUUM PUMP MS SERIES MS series is a vacuum pump which is categorized as screw type dry vacuum pump. Corrosion resistance and ...
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