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... coil (MS-ICP) and its application for array of compound semiconductor materials. The APX300-S can process wafers used in the power devices, SAW filters, communication devices or MEMS sensor markets. Our ...
The Edge Isolation + PSG Etching Inline System combines several process steps in one system with modular design. On the one hand the emitter layer on the rearside of the wafer generated during the diffusion ...
... density means higher etch rates can be achieved for strongly bonded materials. The Omega SynapsEtch is routinely used for etching of deep features in dielectric materials including silicon oxide, quartz and glass. Other ...
KLA Corporation
... electronics minimizes cleanroom footprint and the system has been designed for easy wafer size changes and maintenance. • Compatible with 100mm-200mm wafers • Batch size up to 3 wafers • ...
KLA Corporation
... RENA’s wet etching tool for caustic or acidic applications is built to achieve outstanding surface results in semiconductor wafer production. Acidic etching combined with a fast transport ...
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