Positioning systems for optical applications

Repeatability: 1 µm
Load: 15 kg
Stroke: 200 mm - 1,000 mm

XYZ Gantry for highly dynamic applications Customizable • Ideal for high precision and dynamic applications • Very large travel range of 1300 x 800 mm • High ...

Repeatability: 0.3 µm - 2.5 µm
Load: 5 kg - 20 kg
Stroke: 100 mm - 720 mm

... for automated inspection of wafers / semiconductors • Very large travel range of 2 x 720 x 720 x 100 mm each • Allows the integration of two processes simultaneously This inspection system consists ...

Repeatability: 0.3 µm - 0.5 µm
Stroke: 50 mm - 200 mm
Speed: 30 mm/s

XYZ positioning system for high precision automated optical inspection Customizable: • Ideal for high-precision automated inspection processes • High repeatability ...

Repeatability: 0.3 µm - 0.4 µm
Stroke: 100 mm - 200 mm
Speed: 15 mm/s - 25 mm/s

XYZ system with controller Customizable: • Ideal for setting up and expanding of your application • Highly precise repeatability up to 0.3 µm • Smallest steps and highest reliability at comparatively ...

Repeatability: 0.8 µm - 4 µm
Load: 1 kg
Stroke: 25 mm - 25 mm

... miniaturized X-Y-Z system is ideal for positioning applications where space is limited. Combined with a fine thread spindle, the XYZ Stage achieves very high resolution ...

Repeatability: 0.001 µm - 3.5 µm
Load: 6.5 kg
Stroke: 4 mm - 20 mm

... manipulator includes an XY Stage in the horizontal axis and a Tripod for vertical strokes and two tilts, which combines the strengths of cartesian and parallel kinematic designs in one system. Specifications: - ...

Repeatability: 5 µm
Load: 30 kg
Stroke: 300 mm

Open-frame XY stages designed with a low profile for a wide range of automated accurate positioning in microscope-based applications. The drive mechanism located on the side of the unit ...