RF plasma generators

The air-cooled RF generator TruPlasma RF 1001 Air delivers up to 1000 watts of high-precision, reproducible RF energy with an extremely fine resolution – in increments ...

The decisive factor in coating or structuring surfaces is a stable and reproducible plasma current supply. RF generators of the TruPlasma RF Series 1000 / 3000 (G2/13) ...

... output power to be scaled to up to 80 kW. These compact VHF generators are also very cost-effective and have a robust design. Precise and fast arbitrary pulse shapes This provides the best plasma ...

With these RF generators you can rest assured the TruPlasma RF Series 3000 stands out for its robust design and high efficiency. This means it is best suited for stable reproducible plasma ...

... complement to RF generators from TRUMPF Hüttinger. Their intelligent matching algorithm and digital control platform for process monitoring provide a comprehensive solution in which all of the components ...

As the semiconductor industry speeds toward a new inflection, the eVerest™ RF generator fills the need for transformational plasma control. Its configurable multi-level pulsing enables ...

The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, ...

... Emerging Plasma Applications Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced ...

... flexibility. Paramount® HF RF generators offer wide power ranges, support multiple integration scenarios, and are equipped with standard serial/analog interfaces and other optional communication interfaces. ...