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Repeatability: 1.9 µm - 4.4 µm
Load: 50 kg
Stroke: 100 mm - 1,000 mm
... cycles and a maintenance interval of 500,000 full cycles resp. every 2 years This positioning system moves a vacuum chuck on an area of 1000 x 1000 mm. The standard system ...
Load: 100 g
Operating under extreme environmental conditions with sub-nm resolution, a scanner used in precise imaging technology. *Customization available
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