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The Auto SE is a spectroscopic ellipsometer, manufactured by HORIBA Scientific. It enables automatic analysis of thin film samples with simple push button operation. In a few seconds, a complete analysis ...
HORIBA Scientific
NEW UVISEL PLUS: THE REFERENCE ELLIPSOMETER FOR THIN FILM MEASUREMENTS The new UVISEL PLUS spectroscopic ellipsometer includes the newest acquisition technology designed to measure thin ...
HORIBA Scientific
The UVISEL 2 VUV is a ne generation of phase modulation ellipsometer for VUV measurement. It is the main spectroscopic ellipsometer available, intended to convey the quickest thin film ...
HORIBA Scientific
... array of ellipsometer like in-situ and in-line are used in controlling processes in research and in industry. From thin film monitoring to large area mapping and in-line characterization of flexible devices. In-situ spectroscopic ...
HORIBA Scientific
The M-2000® line of spectroscopic ellipsometers is engineered to meet the diverse demands of thin film characterization. An advanced optical design, wide spectral range, and fast data acquisition combine ...
J.A. Woollam Co.
... and next-generation spectrometer design. The RC2 is a near-universal solution for the diverse applications of spectroscopic ellipsometry. Advanced Measurement Capabilities The RC2 is the first commercial ...
J.A. Woollam Co.
The iSE is a new in-situ spectroscopic ellipsometer developed for real-time monitoring of thin film processing. Using our proven technology, the iSE enables users to optimize optical properties of deposited ...
J.A. Woollam Co.
The theta-SE is a push-button spectroscopic ellipsometer for characterizing thin film uniformity. It features advanced ellipsometry instrumentation in a compact package at an affordable price. Fully ...
J.A. Woollam Co.
... Proven spectroscopic ellipsometer technology gives you both thickness and index with much higher certainty than other techniques. Flexible Works with your materials – dielectrics, semiconductors, ...
J.A. Woollam Co.
... features a rotating analyzer ellipsometer (RAE) combined with our patented AutoRetarder® for unparalleled data accuracy. High Precision Wavelength Selection The scanning monochromator is designed specifically for ...
J.A. Woollam Co.
The IR-VASE® is the first and only spectroscopic ellipsometer to combine the chemical sensitivity of FTIR spectroscopy with thin film sensitivity of spectroscopic ellipsometry. The IR-VASE ...
J.A. Woollam Co.
The VUV-VASE® variable angle spectroscopic ellipsometer is the gold standard for optical characterization of lithography thin films. It measures wavelengths from vacuum ultraviolet (VUV) to near infrared ...
J.A. Woollam Co.
The PHE spectroscopic ellipsometer software has a model and film library with predetermined measurement parameters, which allow the operator to select an application and quickly execute a measurement. ...
UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact ...
A spectroscopic ellipsometer is an optical instrument used to measure precisely the thickness of coatings or determine the physical and optical properties of a surface.
ApplicationsSpectroscopic ellipsometers have undergone significant development thanks to computer technology for analysis of their measurements. They are used in the optical and microelectronic industries and in the manufacture of photovoltaic cells.
TechnologiesThe spectroscopic ellipsometer uses a polychromatic (UV, visible, IR) light source. Its polarized light beam is reflected from a plane-surface sample, changing its polarization. The reflected beam travels through a rotary analyzer and then to a spectrometer. Measuring a portion of the spectrum at varying angles of incidence yields a large number of measurements. These can be compared to a computer database to characterize the sample using a variety of parameters.
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