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Turbomolecular vacuum generators
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Ultimate vacuum: 0.01 mbar
Flow rate: 110 m³/h
is a range of low energy compact dry pumps for light duty applications such as wafer handling, PVD, and metrology. Fast chamber pump down and extremely low power usage The iXL600(N) and iXL1000(N) dry pumps are among the ...
EDWARDS
Ultimate vacuum: 10, 9.5, 18 mbar
Flow rate: 240, 300, 85, 400 l/s
Power: 160 W - 750 W
Edwards launch two new variants to the nEXT turbomolecular pump range, the nEXT730 and nEXT930, bringing 730 l/s and 925 l/s pumping speeds for Nitrogen to the nEXT range. BURGESS HILL, West Sussex, UK (02 April ...
EDWARDS
Ultimate vacuum: 0.03, 0.01 mbar
Flow rate: 20.4, 17 m³/h
Power: 90 W - 8,500 W
Delivering high ultimate vacuum and rapid pumping speeds Small EM oil sealed rotary vane pumps are renowned for achieving high ultimate vacuum and rapid pumping speeds with quiet operation and the ability ...
EDWARDS
Flow rate: 67 l/s
Noise level: 48 dB
Weight: 1.7, 3.1 kg
turbomolecular vacuum pump, hybrid bearing, ceramic ball bearing Compact yet powerful turbopumps with pumping speeds of up to 67 l/s for N2 Product description • - Compact design for minimum footprint • ...
Pfeiffer Vacuum+Fab Solutions
Flow rate: 10 l/s
Small and robust turbopump with a pumping speed of 10 l/s for N2 Product description • - The small design makes for minimum footprint • - Particularly insensitive to vibration, ideal for mobile applications • - Integrated drive ...
Pfeiffer Vacuum+Fab Solutions
Flow rate: 32 l/s
Small, high-performance turbopump with a pumping speed of up to 32 l/s for N2 Product description • - Minimum space requirement due to extremely compact design • - Integrated drive electronics, suitable for industrial environments ...
Pfeiffer Vacuum+Fab Solutions
Flow rate: 64 l/s
Small yet powerful turbo molecular pump without Holweck-stage with a pumping speed of up to 64 l/s for N2 Product description • - The small design makes for minimum footprint • - Integrated drive electronics, suitable for industrial ...
Pfeiffer Vacuum+Fab Solutions
Flow rate: 71 l/s
Compact yet powerful turbopumps with pumping speeds of up to 67 l/s for N2 Product description • - Compact design for minimum footprint • - High pumping speed and maximum compression for all gases • - Integrated drive electronics, ...
Pfeiffer Vacuum+Fab Solutions
Flow rate: 260 l/s
Compact yet powerful turbopumps with pumping speeds of up to 260 l/s for N2 Product description • - Maximum reliability in a compact design • - Maximum reliability through monitoring of operating data • - Available with multiple ...
Pfeiffer Vacuum+Fab Solutions
Flow rate: 0 l/s - 685 l/s
Maximum vacuum performance in a compact design with a pumping speed of 685 l/s for N2 Product description • - Minimum footprint and maximum reliability • - High gas throughput and high pumping speed • - Suitable ...
Pfeiffer Vacuum+Fab Solutions
Flow rate: 0 l/s - 790 l/s
Maximum vacuum performance in a compact design with a pumping speed of 790 l/s for N2 Product description • - Minimum footprint and maximum reliability • - High gas throughput and high pumping speed • - Suitable ...
Pfeiffer Vacuum+Fab Solutions
Flow rate: 0 l/s - 1,300 l/s
Powerful turbopumps with pumping speeds of up to 1,300 l/s. Product description • - High pumping speeds for both light and heavy gases • - High process integrity, resistant to particulate matter • - High gas throughputs, even for ...
Pfeiffer Vacuum+Fab Solutions
Flow rate: 0 l/s - 1,450 l/s
Powerful turbopumps with pumping speeds of up to 1450 l/s. Product description • - High pumping speeds for both light and heavy gases • - High process integrity, resistant to particulate matter • - High gas throughputs, even for ...
Pfeiffer Vacuum+Fab Solutions
Backing Pumps for Turbomolecular Pumps The DIVAC T range of diaphragm pumps comprises backing pumps which are used in all applications requiring an especially low base pressure while having to maintain an oil-free vacuum. ...
Leybold
Flow rate: 400 l/s - 440 l/s
The new Leybold Vacuum product line TURBOVAC i /iX with integrated drive electronics provides best pumping performance on ISO 100 and 160 flange size. It allows easiest pump integration, operation and control thanks to ...
Leybold
The TURBOVAC turbomolecular vacuum pumps with mechanical rotor suspension are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-1 Torr). Pumping speeds for air vary ...
Leybold
Flow rate: 365 l/s
... Integrated Frequency Converter Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve ...
Leybold
Flow rate: 300 l/s
... Integrated Frequency Converter Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve ...
Leybold
Ultimate vacuum: 0.1 mbar
Flow rate: 25 l/s - 3,600 l/s
EVT series The EVT-series are the most reliable high vacuum pumps on the market. Eurovacuum EVT-series Turbo Molecular Vacuum Pumps are rubust, reach a good ultimate vacuum and are ...
... integration of up to 2 vacuum gauges SPECIAL FEATURES / FURTHER APPLICATIONS ・Evacuation system of various experiment and R&D equipment ・Evacuation system from atmospheric pressure to high vacuum ...
ULVAC GmbH
... to configure centralized monitoring system. Safety design with fracture energy absorption construction can reduce damage on vacuum system when trouble happened with the pumps. High durability and high reliability have ...
ULVAC GmbH
Ultimate vacuum: 0.13 mbar
Flow rate: 0.5 l/min
... stable and is low) are adopted, and environment without the infinite oil near zero is realized. Achievement of clean, ultrahigh vacuum is possible. Adoption of a fine dynamic balance rotor and a highly efficient bearing ...
ULVAC GmbH
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