超高真空用バルブ 152 series

ゲート空圧式絶縁

63 mm, 100 mm, 160 mm, 200 mm, 250 mm
(2.48 in, 3.937 in, 6.299 in, 7.874 in, 9.843 in)

最大: 7 bar
(101.5 psi)

最少: 4 bar
(58 psi)

最大: 250 °C
(482 °F)

最少: 0 °C
(32 °F)

480 l/s, 1,700 l/s, 6,000 l/s, 12,000 l/s, 19,400 l/s
(126.8 us gal/s, 449.09 us gal/s, 1,585.03 us gal/s, 3,170.06 us gal/s, 5,124.94 us gal/s)