Laser micro-machining machine microPREP™ PRO FEMTO

for metals

Micromac AG, the industry leader in laser micromachining and roll-to-roll laser systems for the semiconductor, photovoltaic, glass and display markets, today introduced the microPREP™ PRO FEMTO laser micromachining system for high-speed Atom Probe Tomography (APT) and cross-section sample preparation. Fulfilling a critical need for atomic-scale materials analysis, the microPREP PRO FEMTO system features a femtosecond laser and optimized optical setup, which enables micrometer-precision removal of material in minutes versus many hours with focused ion beam (FIB) milling while avoiding mechanical and thermal damage to the sample. The microPREP PRO FEMTO enables APT microtip coupons to be prepared directly from the sample material with automated workflows. This frees up valuable FIB resources to be utilized more cost effectively for final preparation steps only, such as final annular focused milling and polishing of the microtips. The Department of Materials Science at Montanuniversität Leoben (the University of Leoben), a leading research university in the fields of mining, metallurgy and materials science, has purchased the first microPREP PRO FEMTO system and is now using it for the preparation of APT specimens, focusing on a variety of different materials. According to Dr. Michael Tkadletz, Chair of Functional Materials and Material Systems at Montanuniversität Leoben, “APT is a crucial technique for the knowledge-based development of modern high-performance materials.