Temperature converter Luxtron M-1100

fiber opticsDIN railcompact

Fiber optic temperature sensing for semiconductor in etch and deposition applications The Advanced Energy's Luxtron® M-1100 is the latest FluorOptic® thermometry (FOT) converter platform, featuring an advanced light source and improved ultralow noise electronics. Two new proprietary phosphor formulations VioLuxTM and RubiLuxTM have been developed to deliver 0.5°C accuracy, repeatability, and stability over an extended range -200 to 450°C Measurement range from -200 to 450°C to support advanced etch processes Advanced low-noise electronics and algorithms give precision better than 0.05° AccuDisc™ sensors enable sensor to be separate from the probe enabling greater accuracy and repeatability Experienced team to support custom probe development for OEMs Compact, DIN-rail size to minimize footprint when integrated into tools and equipment Immune to electromagnetic interference from EMI, RF, high voltage and microwave sources Benefits Non-contact measurement to minimize the thermal offset Easy to install into OEM equipment Features Wide supported temperature range Low noise level with fast response rate 5 channels in a single converter Flexible communication outputs