RF plasma generator Paramount

Advance your process development with a new focus on operating flexibility. Paramount® HF RF generators offer wide power ranges, support multiple integration scenarios, and are equipped with standard serial/analog interfaces and other optional communication interfaces. The Paramount HF enables high plasma density and ion energy required by high aspect ratio devices and speeds process for the next node of semiconductor processing tools. The Paramount platform’s digital architecture provides precise power management and streamlines new function integration — no lead times or hardware changes needed. High-power output and repeatable performance is achieved by real-time detection of plasma changes. And internal-protection limits facilitate reliable operation. • Full digital control • Frequency tuning, pulsing, and pulse synchronization • Real-time power and impedance measurement • Arc management • Phase synchronization (CEX) • Enhance plasma stability and process repeatability • Precisely control RF power • Quickly respond to plasma changes • Easily adapt to meet specific application needs