RF match network Navigator II

The Navigator® ll is equipped with microprocessor-controlled, stepper-motor drives, and advanced tuning algorithms, enabling optimized RF power. An optional internal Z’Scan® II RF sensor provides real-time analysis of process power and impedance, allowing you to quickly identify and significantly reduce process variability. Optional Virtual Front Panel software is available for monitoring and control through a user’s computer. • Digital architecture with enhanced tuning algorithms • Pulsed-RF power delivery • Sweep-frequency operation • Intermodulation distortion (IMD) immunity for multi-frequency applications • Real-time process power and impedance measurement • Speeds tuning/matching response time • Tightens process control • Helps increase tool throughput and product yield