Remote plasma source MAXstream

Advanced Energy’s MAXstream™ line is the next generation of remote plasma sources for chamber cleaning. The MAXstream is available in 3, 6, 8, 10, and 12 SLPM NF3 flow rates to optimize price and performance. Ensuring long chamber life and low particle generation, Advanced Energy brings its proven and differentiated plasma source materials and technology. The unique dual ignition core design delivers best-in-class plasma ignition reliability. Featuring a reliable and strike-every-time ignition, MAXstream RPS offers more consistent operation and less downtime for RPS maintenance. The MAXstream RPS facilitates drop-in compatibility with traditional RPS systems, simplifying design-in compatibility as well as enabling seamless field upgrades to a new reliable and repeatable solution. • Five models: MAXstream 300 for low flow applications and MAXstream 600, 800, 1000, 1200 for higher flow applications • Highly reliable RPS maximizes tool uptime • Drop-in capability with traditional RPS units for an easy design upgrade path to higher performance and reliability • Enhanced cooling of plasma source walls to reduce damage from thermal expansion and chemical erosion • Active monitoring and control of plasma power for industry-leading power control