ANT95V-3 is a linear-motor-driven, wedge-style vertical lift stage. It can be easily integrated with other stages, including those in the ANT95 family, for superior multi-axis performance and is offered in two accuracy grades.
•High resolution (1 nm), repeatability (100 nm) and accuracy (200 nm)
•In-position stability of <1 nm
•Anti-creep crossed-roller bearings
•High dynamic performance
All of the original ANT series' direct-drive advantages have been preserved in the ANT95V-3 family. Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95V-3 stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.