Rotary positioning stage ABRT series

motorized1-axishigh-accuracy

Our ABRT series rotary air-bearing stages provide superior angular positioning, velocity stability and error motion performance along with impressive payload capacity and outstanding radial and axial stiffness. The ABRT is designed to meet the exacting requirements of wafer inspection, high precision metrology applications, X-ray diffraction systems, optical inspection and fabrication and MEMS/nanotechnology device fabrication. •Zero-cogging motor for outstanding velocity stability •Outstanding error motion and wobble performance •Direct coupled, high-accuracy rotary encoder •Large diameter clear aperture •No mechanical contact Superior Mechanical Design The ABRT design features large air-bearing surfaces and innovative preloading for high stiffness and load capacity, producing not only excellent axial and radial error motions, but outstanding tilt error motion, as well. The resultant performance is significantly better than other rotary air-bearing tables and spindles, greatly benefiting applications requiring exceptional planar performance. Furthermore, this stage family provides a clear aperture that can be used for product feed-through, laser beam delivery, cable clearance or application-specific requirements.