AERZEN canned motor vacuum blowers are a type of positive displacement blower that comes with a hermetically sealed
drive ideal for the conveyance of aggressive and neutral gases. These vacuum systems are useful in industrial high vacuum technology due to their high power, reliability, and efficiencies.
The advantages of AERZEN Canned Motor Blowers at a glance:
Excellent variety with four motor variants
Highly flexible vacuum components with vertical and horizontal direction of flow
High mechanical strength pumps (up to 230 mbar in case of HM)
Low nitrogen and water consumption
Reduced pumping down times
Neutral or aggressive gases? AERZEN offers solutions for both!
AERZEN vacuum blowers with hermetically sealed drive (HM) are designed for conveying neutral and aggressive gases and find special application in industrial high vacuum technology. Vacuum blowers always work in combination with a backing pump*.
This backing pump starts operating at atmosphere. The vacuum pumps is connected typically at approx. 50 to 200 mbar and the pump down process begins. Depending on the application, liquid ring pumps, sliding vane rotary vacuum pumps or screw vacuum pumps are used as the backing pump. When supplied with AERZEN frequency converters and special parameter sets, operation with the backing pump starting from atmospheric pressure is also possible.
Applications
Semiconductor industry
Micro-electronics
Production of flat screens
Laser technology
Solar technology
Helium leak indicating units
Chemical process technology
Foil and glass coating
Manufacture of melting furnaces
Evacuation of hydrogen