Tubular furnace IWQ

meltinggasvacuum

ALD’s IWQ induction heated quartz tube furnaces have found many applications whenever specialized, high-temperature processes need to be isolated from the heating elements. Materials heated in an IWQ furnace have a high degree of purity since there is no chemical interaction between the induction heating source and the material being processed. IWQ systems are available in a wide range of sizes up to 1-meter tube diameter and 2‑meter long process chamber. Energy is coupled into the feedstock either via a susceptor or directly via the charge carrier. The induction heated, quartz tube furnace can accommodate controlled atmospheres such as reducing (hydrogen), oxidizing, inert gas and vacuum as well as protect against aggressive vapors and chemicals at temperatures up to 2000 °C. The IWQ furnaces also offer a high degree of axial and radial temperature uniformity.