Rotary magnetron

cylindrical

Complete assemblies in both drop-in and side mount are available using 3″ (75mm) or 5″ (125mm) backing tube diameters in lengths up to four meters and with a minimum source to source spacing multiple in-line arrays are available for compact high throughput production systems. The ONYX-Revolution™ utilizes a universal and cost-effective magnet design with customized turnarounds to fit any target type. And, it is designed with off-the-shelf components for low-cost, long-term investment and reliability. Angstrom Sciences’ patented profiled magnet technology creates a deposition profile that is closer to normal between the source and the substrate. The improved deposition profile offers reduced debris accumulation on the chamber walls. Additionally, Angstrom Sciences’ magnet array offers a higher magnetic field intensity, which allows the user to run the sputtering process at lower power to achieve typical deposition rates. Inherently, Cylindrical Magnetrons can hold up to three times the amount of target material as a planar magnetron with the same spatial area. Angstrom Sciences’ ONYX-Revolution™ further optimizes material investment with up to 85% target utilization. Plus, operating at lower power levels results in a typical power savings of 20%.