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Pulsed magnetron
customcircular

Pulsed magnetron - Angstrom Sciences, Inc. - custom / circular
Pulsed magnetron - Angstrom Sciences, Inc. - custom / circular
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Characteristics

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pulsed, custom, circular

Description

Angstrom Sciences’ circular magnetrons have become recognized as the standard of the sputtering industry because of the Angstrom Advantage™ and a host of other design features that deliver almost unlimited possibilities in configuration and process performance. Their compact design makes our circular magnetrons ideal for any new or retrofit application, including the most complex cluster assemblies for the smallest vacuum chambers. Low-impedance heads provide RF, DC, mid-frequency DC, pulsed DC, HiPIMS, and microwave power compatibility. We use ISO NW standard fittings, as well as Conflat® metal seal flanges. All utilities are maintained at atmosphere and are accessed through standard O-ring compression fittings for easy installation in any vacuum system. Circular magnetron sources are available from 1″ (25mm) through 16″ (406mm) and larger target diameters in either standard or custom configurations. Our patented threaded target clamp and anode shield on our small circular cathodes allow you to change targets without the use of ancillary tools. Their built-in adjustability also lets you fit targets of varying thickness without using any spacing devices. ONYX® magnetrons can operate at extremely low pressure (down to the 10-4 Torr range), and our direct cooled designs can deliver power densities up to 250 watts/in2 (30 watts/cm2) continuous operation.

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