Circular magnetron

For applications that require the substrate to be exposed to extended periods of high thermal exposure, Angstrom Sciences’ High Temperature Circular Magnetrons are optimized with ceramic insulators and vacuum seals that allow the cathode to sustain performance parameters while under high heat conditions. High Temperature designs are available that will run at 200, 300, and 450 degree Celsius. High Temperature Circular Magnetrons are designed for base pressures in the 10-9mTorr range and are specially engineered to allow for variations that may occur throughout thermal cycling without leaks or film quality deviation.