High Power RF Magnetron Sputtering Cathodes can be successfully implemented in R&D and production applications provided that specific design criteria are incorporated into the construction.
Circular High Power RF Magnetrons are directly cooled and available in 2″-8″ outer diameters.
Because RF power operates at a high frequency it is vital that the magnetron sputtering cathode is designed to rein in that power. Angstrom Sciences’ High Power RF magnetrons ae designed to deliver RF energy uniformly across the target surface while providing low reflected power and RF confinement.
High Power RF Magnetrons are available in both Circular and Linear configurations.