L13E series Ф131 ultra-high throughput filter cartridges are specifically designed for the wet processing applications in TFT-LCD manufacturing, such as substrate cleaning, etching, stripping and DI water flushing. The filters are available in various materials and wide range of removal ratings, with their unique construction and high filtration area, resulting in reduced change-out and operating costs. They have excellent compatibility with the various process liquids, capable of 200L/min required for G6-10 process.
Features and Benefits
● Available in various materials and removal ratings
● High filtration area and long service life
● High flow rates and low pressure drop
● Reduced filtration operating costs
Quality
● Cartridges produced in a controlled environment
● Manufactured according to ISO9001 certified Quality Management System
Specification
L13E Series Filter Cartridge for Wet Cleaning Applications
Material of construction
Membrane
PP/PES/PTFE
Support & Drainage
PP
Core & Cage
PP
End Caps
PP
O-rings/Gasket
EPDM/Viton/TEV
Sealing Technology
Thermal Bonding, No Adhesives
Dimensions
Outer Diameter
131mm (5.2 in)
Length
10”
Filtration Area
≥ 20.0 ft2(1.86 m2)
Removal Ratings, μm
PP: 2.0, 4.5, 10, 20, 30, 40
PES: 0.1, 0.22, 0.45, 1.2
PTFE: 1.0, 3.0, 10
Maximum Operating Temperature
80℃(176℉)
Maximum Forward Differential Pressure
4.1 bar @ 20 ℃/60 psid @ 68℉
3.4 bar @ 50 ℃/50 psid @122℉
3.1 bar @ 80℃/45psid @ 176℉