■ Fast settling time 1000:1
■ Rigid stable design IP 40
MEMS-based standalone mass flow controller (MFC) designed for OEM applications, where shielding and IP40 protection are required. The platinum-based MEMS chip technology guarantees excellent stability and repeatability over the whole flow range. Due to their unmatched dynamic range and multi-gas capability, Axetris MFC modules can replace several conventional mass flow controllers with a single unit.
The compact and robust design makes it also an ideal choice for portable applications as for example leak testing devices or any other handheld systems.
- Compact design with protection class IP40
- Reliable control performance with low maintenance
- Configuration according to customer requirements