Thermal mass flow meter CMS series

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The CMS series hydrogen and helium gas mass flow meters employ our proprietary Micro Flow thermal flow rate sensor as the sensing element. Through integration of this ultraminiature mass flow sensor, which is manufactured using micromachining technology and advanced ultrafine channel design, an unprecedented level of high accuracy and wide measurement range have been achieved at low cost. Boasting both ease of use and high reliability, these flow meters will set the standard for the future.