These series machines are high-precision, four-axis and single side polishing machines. It can be equipped with copper plate, tin plate, stainless steel plate, etc., suitable for high-precision polishing of various semiconductor materials to meet the needs of large-scale industrialization.
Use air cylinder to pressurize, precise pressure control
Active drive of polishing head
Polishing plate temperature control system
Man-machine conversation operation interface, comprehensive functions and easy operation