The full automatic grinding machine is a high-precision grinding machine equipped with fully automatic loading and unloading system, uses wafer manipulator to pick up the wafers, has automatic centering, cleaning and drying functions. It can realize automatic grinding process from cassette to cassette, and keep wafers dry in and out.
Complete function
Automatic thickness measurement and compensation, multistage grinding program, waiting under overloading and other function, meeting various process requirements.
Abundant Specification
Single or double axis grinding unit.
Fully automatic system
Fully automatic loading and unloading, automatic grinding system to keep wafers dry in and out
Good compatibility
Operating table can be customized according to customer’s needs, can meet grinding and thinning process requirements of various semiconductor materials.