1.Achieve dispensing,viscose,sticky film,placement,wafer sticky,inverted packaging,Gaas,adhesive pressure control,high precision.
2.Use ultra-precision air movement platform,the main system X,Y axis use a high-resolution linear encoder with zero pressure,completely non-contact frictionless air float system,Encoder scale can reach to 0.02um accuracy,can achieve high-speed,precision,sub-micron-level positioning
3.The platform design use granite integrated high-speed sports platform of high stability,so that T8W in ensuring thermal stability and mechanical stability and achieve high-speed start time and +-1.5 um and even better patch accuracy at the same time,so as to meet the high precision application requirements.