On a compact, lightweight but still rugged mounting rail system one or more mass flow or pressure sensor modules can be combined with control valves, shut-off valves, mixing chambers, filters or any other functional module as per customer's request. The specifications are open for discussion. The ranges for the flow sensor can be selected between approx. 5 mln/min up to 50 ln/min or even higher. In case a pressure sensor is included, the pressure range can be chosen between 0-100 mbar and 0-10 bar absolute or gauge.
Features
Compact assembly ensures space efficiency
Economical solution, low cost of ownership
Tubeless construction reduces potential leak points
Service friendly; easily accessible from the top (top-mount functional modules)
Great flexibility regarding system extension or modification
Pre-tested "Plug and Play" units, reducing custom testing requirements
Analog or digital communication (RS232, CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS)
Applications
The FLOW-SMS Series has great potential in many different markets, for instance in:
Vacuum, plasma, sputter and coating processes
Semiconductor and solar cell production
Catalyst test benches
Burner control (welding)
Biotechnological and chemical installations
Food and beverage processes
Because of the infinite number of possible solutions, we recommend you to contact our nearest distributor to discuss your application.