Mass flow controller GF1 series

for gas

Enhanced with the Speed of EtherCAT® Performance Perfected for Semiconductor Processes • Embedded diagnostics leverage real-time EtherCAT® data acquisition capabilities • Ultra-stable flow sensor (≤ 0.15% of S.P. drift per year) enables tighter low set point accuracy and reduces maintenance requirements • Improved valve shutdown (≤ 0.15% of bin range) reduces valve leak-by to reduce first wafer effects • Newly enhanced pressure transient insensitivity reduces crosstalk sensitivity for consistent mass flow delivery Features • Long-term zero stability of <±0.15% full scale per year • Settling times: 300 ms - <1 second • All-metal seal flow path: option for 5µ or 10µ inch Ra surface finish • Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures • MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy • Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes