Thermal mass flow meter GF1 series

massfor gasin-line

High purity flow path. Outstanding performance, reliability, and repeatability. Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy. The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity. Features • Long-term zero stability of <±0.5% full scale per year • Settling times: 700 ms - <1 second • All-metal seal flow path: option for 4µ or 10µ inch Ra surface finish • Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures • MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy • Local display • Optional SDS gas delivery • DeviceNetTM, RS-485 L-Protocol and analog interfaces Benefits High-performance components marathon tested to seven times semiconductor industry standards for reliability All metal, corrosion resistant flow path with reduced surface area and unswept volumes ensures faster dry-down during purge steps