Interstitial oxygen analyzer SiBrickScan (SBS) Silicon Ingot Analyzer

concentrationfor silicon ingot

SiBrickScan (SBS) is a dedicated at-line system for the FTIR quantification of interstitial Oxygen in complete Silicon ingots, resulting in a precise concentration profile along the longitudinal axis. Accessing this information without sawing wafers or preparation of test samples is a major and cost saving advantage: qualify individual ingots before sawing and optimize the Si crystallization process! Unique SBS features: • High sensitivity with achievable Oxygen detection limits < 2 ppma • High quality calibration directly linked to ASTM/SEMI 1188 • Available for square and cylindrical ingots of different diameters • Innovative high sensitivity beam path with integrated reference sample • Intuitive and comfortable user interface • Automated data evaluation • Industry compatible and robust design with precise linear drive • Liquid N2 free infrared detector