Magnetron sputtering deposition machine STARpro

thin-filmvacuumfor optoelectronics

Bühler Leybold Optics’ STARpro is a new reactive single magnetron sputter coating system dedicated to precision optics applications. The system is very easy to install and operate. Moreover, STARpro achieves spot-on accuracy and high reproducibility throughout the entire target lifetime by the implementation of Bühler Leybold Optics’ premium optical measuring system LEYBOLD OPTICS OMS 5100. Space-saving super compact design With the smallest footprint within our product portfolio, the STARpro can be placed even within niches. This makes it a perfect fit for the smallest laboratory environments, especially in combination with a large variety of possible coating processes. Process devices configurable for impressive product diversity Through the use of SiO2 and Si3N4 multi-layers, products ranging from anti-reflective coatings to band-pass filters, edge filters, dielectric mirrors and dichroic filters can be produced. A load lock which is separate from the process chamber ensures that the substrates will not be contaminated by particles. With a maximum of four substrates to be coated in parallel, the STARpro is the perfect choice for fast layer prototyping and small-batch optical filter production. Highly precise reproducibility thanks to an in-situ optical measuring system The premium in-situ optical measuring system LEYBOLD OPTICS OMS 5100 ensures that the designed layer stack is precisely achieved at any time. A quick download of the theoretical layer design in combination with the Bühler Leybold Optics software tool LEYBOLD OPTICS "SimuOMS5000" makes it possible to achieve the calculated optical performance with the first shot on the STARpro.