PVD deposition machine NESSY series

magnetron sputteringthin-filmvacuum

The NESSY series is a latest generation magnetron sputter system by Bühler Leybold Optics. It is dedicated to the production of coatings of extreme ultraviolet (EUV) mirrors under ultra-high-vacuum (UHV) conditions and is designed for mass production as well as for the development of new products. NESSY coaters can be equipped with up to six different rectangular sputter cathodes and can use molybdenum and silicon, together with other materials that are essential to achieve a complete mirror coating. As a result, a complete coating stack can be performed in one cycle. Breakthrough applications with a coater fit for the future Molybdenum-silicon multi-layer mirrors with maximum reflectance at a wavelength of 13.5 nm have become a classic in reflection technology. These mirrors are indispensable as condenser or projector mirrors in next-generation lithography equipment. In addition to EUV lithography, multi-layer interference mirrors can be used in X-ray measuring devices, synchrotron radiation optics and other sophisticated science applications. The wide variety of complex substrates makes NESSY the perfect choice for the development of novel applications and components.