PECVD deposition machine PylonMet

magnetron sputteringmetalized filmvacuum

The Leybold Optics PylonMet is a flexible and versatile high-throughput batch-type magnetron sputtering system for the coating of three-dimensional parts. The machine concept allows a flexible configuration and a versatile deployment in a broad range of applications. This includes reactive and non-reactive magnetron sputter deposition with inter-pole targets (IPT). The advanced mid-frequency (MF) plasma-enhanced chemical vapor deposition (PECVD) source allows the deposition of transparent top-coats and enhanced wipe-resist layers. The efficient vacuum pumping system, including an effective cryo-coil system and a flexible process-gas-management system, are further key elements. Flexible configuration for excellent coating versatility - The flexible configuration of the PylonMet makes it suitable for use with a variety of sputtering materials, including aluminum, chromium, stainless steel, copper, silver and many others. It produces different colors on two- and three-dimensional parts in 24-hour production. The highest level of repeatability ensures consistent quality. High productivity and reliability thanks to swivel-type front door and easy access - The swivel-type front door allows highly productive processing and loading/unloading sequences. Substrates are loaded to an easy-to-access pylon, or optionally, to a planetary-substrate-fixture system. The automatic loading and unloading option is a key factor in the high reliability of the system.