PECVD deposition machine DynaLine

magnetron sputteringmetalized filmvacuum

The DynaLine by Leybold Optics is a fully automated modular inline sputtering machine with the highest productivity for the automotive industry. Due to its modular concept, the machine can be integrated into fully automated conveyor systems and customized to specific configurations. Substrates are loaded onto a carrier and are subsequently processed via static deposition processes. High-efficiency pumping systems, a robust carrier drive and precise vacuum lock systems are further features of this machine. High productivity thanks to integration-capable substrate carrier - The DynaLine offers top-level productivity for the automotive industry, made possible by a substrate-carrier configuration which can be integrated into a fully automated conveyor system. Flexible system configuration thanks to modular concept - The DynaLine is designed with a modular concept for flexible configuration. This particular design enables users to effortlessly expand the system with additional chambers. Integrating a new process chamber is possible even after a period of several years. Advanced deposition technology offers excellent coating flexibility - Magnetron sputter deposition with inter-pole target (IPT) for the high-rate deposition of metals and advanced mid-frequency (MF) plasma-enhanced chemical vapor deposition (PECVD) for the deposition of siloxane top-coat form the backbone of the system, offering a variety of coating possibilities.