- Hydraulics - Pneumatics
- Pump
- Screw vacuum pump
- Busch Vacuum Solutions
Screw vacuum pump COBRA BC 0101 Gdrymotorwater
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Characteristics
- Technology
- screw
- Lubrication
- dry
- Applications
- water, motor
- Other characteristics
- compact
- Ultimate vacuum
0.01 mbar
(0 psi)- Flow rate
90 m³/h
(3,178.32 ft³/h)- Power
0.7 kW, 1.5 kW
(0.95 hp, 2.04 hp)- Length
520 mm
(20 in)- Width
300 mm
(11.81 in)- Height
340 mm
(13.39 in)- Noise level
58 dB
- Weight
117 kg
(257.94 lb)
Description
The Ideal Solution for Light to Medium Semiconductor Applications
High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, perfectly suited for tasks in load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing
Efficient
Intelligent variable speed drive, low cost of ownership, minimal maintenance, high uptime, direct water cooling
Compact
Fit-in-place design, directly mounted canned motor, integrated control panel
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.