Feturces
* - Micro depth 3D scanner
* - High speed/non contact metrology measuring
* - Surface analysis
* - Nontransparent/transparent
Applications,
* Touch panel / Solar panel / Wafer
* - Micro Electro Mechanical(MEMS)
* - High-density circuit printed circuit board
* - IC package
* - A variety of measurement functions: microstructure contour, size, holc dcpth, fault film thickncss, hcight différence, angle, roughness, Flatness
-How it works-
White light is short dimming •
The best interference fringes only produce In the focus position, the interference caused by the out-of-focus and stray light is excluded, and the position of the best interference fringe is recorded with the "high-speed surface type CCD camera". No point-by-point scanning is required, and the "vertical scanner" is used to move the objective lens to record the height position., the 3D surface topography of the measurement object can be reproduced.