Laser interferometer SJ6000

for CMMcalibrationfor sub-nanometer displacement measurement

1. High precision of measurement: Resolution is up to nanoscale based on the technology of laser interferometry; With high-precision environmental compensation unit, influences to measuring result from ambient temperature, pressure, humidity and material temperature are eliminated; It can ensure long-term frequency stability of laser by using the laser thermal frequency stabilization control system; The design of separating interferoscope from host avoids heat distortion of interferoscope, which ensures the stability of interference optical path. 2. It can measure linearity, angle, straightness, perpendicularity and other geometrical parameters; It can measure the linear positioning accuracy and repeated positioning accuracy of guide rails for CNC machine tools, coordinate measuring machines and other precision motion equipments; It can measure the pitch angle, swing angle, perpendicularity and straightness of the guide rails, in addition it can calibrate rotary axis of machine tools. 3. According to compensation settings by user, the system automatically generates error compensation table for calibration of machine tools. 4. With functions of Dynamic measurements (displacement-time curve, velocity-time curve, acceleration-time curve), amplitude measurement and frequency analysis, it can analyze vibration test of machine tool, dynamic characteristics of ball screw, response characteristics of drive system, dynamic characteristics of guide rail and so on. 5. Built-in domestic & international standards, such as GB, ISO, BS, ANSI, DIN, JIS and so on.