Model No.: SuperView W1-Lite
Product name: Nano 3D Optical Surface Profilometers
Standard field of view: (0.98*0.98)mm
Max field of view: (6x6)mm
Reflectivity of test object: 0.05 % ~100 %
Repeatability of Roughness RMS: 0.01nm
Scanning range: ≤10mm
Resolution: 0.1nm
Accuracy of stage measurement: 0.3 %
Repeatability of stage measurement: 0.08% 1σ