Excimer laser system LineBeampulsedsolid-stateultraviolet
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Characteristics
- Operational mode
- pulsed
- Technology
- solid-state
- Spectrum
- ultraviolet
- Applications
- process
- Other characteristics
- excimer
- Power
5,400 W
- Wavelength
308 nm, 355 nm
Description
LineBeam systems are the enabling optical technology for mass manufacturing of LTPS backplanes on large substrate panels with the highest yield.
Deliver line beam profiles up to 1500 mm long for panel sizes up to Gen 10.5. Feature short and long axis beam homogeneity for maximum throughput and beam utilization. Superior pulse stability and high depth of field ensure a large process window.
LINEBEAM – SOME KEY PERFORMANCE METRICS
Benefit from the top hat beam profile of LineBeam, with excellent homogeneity in both short and long axes, all at a short wavelength of 308 nm or 355 nm.
Catalogs
MicroLas
6 Pages
Excimer Catalog 2016
52 Pages
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.