Ideal for laboratory tests, prototypes, and small production runs.
Compact and efficient configuration.
Perfectly suited for:
Small sized PCB and sensors (e.g. in electronics, medical applications etc.)
Wafers up to ø 150 mm (6 inch)
Overall dimensions (L x W x H) - 1600 x 1300 x 1600mm
Weight - 200 kg
Chamber size - ∅ 250 x 264 mm
Tooling size - ∅ 226 x 240 mm
Max. tooling load - 30kg
Dimer load capacity - 90g
Pumping capacity - 25 m3/h
Power supply required - 3 x 400V + N + PE – 50 Hz
3 x 25A – 15kW
Parylene processable - Type: C, D, N, F-VT4, F-AF4
Thermalized chamber – temperature range - 20 – 30°C
Options - Compatible with all options