Parylene is the short designation of the polymer group of poly(para-xylylenes). The polymers consist of different substituted para-xylylenes. The original basis for coating are dimers. This is a molecular compound consisting of two identical sub-units, the so-called monomers.
Parylene coatings offer a large number of benefits. Parylenes...
are completely conformal, i.e. they adapt even to complex substrate contours such as sharp edges, bore holes or blind holes
are pinhole-free already from coat thicknesses of approx. 0.5 µm
are chemically insoluble and resistant against a large number of chemicals
have very good barrier properties against moisture and chemicals
have a high dielectric strength
have dry lubricating properties (low coefficient of friction)
are hydrophobic: wetting angle for H2O between 92° and 98°
are transparent between 90 and 96 % in the visible wavelength range (depending on type)
are biocompatible: parylenes of the types C and N can be separated which can be certified to USP Class VI, ISO 10993 and FDA.
Technical data
Coating substance
Parylene N, C, D, F-VT4, F-AF4
Possible coat thicknesses
0.05 to 100 micrometers
Dimensions
Width approx. 2600 mm
Depth approx. 1000 mm
Height approx. 2000 mm
Pyrolysis
4 kW / max 850 °C
Chamber
Diameter: 640 mm
Height: 800 mm
Carousel
Diameter: 560 mm
Height: 650 mm
Exhaust air
42 mm tube
Additional options
Heating coat for improved separation of parylene D
Heat exchanger for improved separation of parylene N and F
LF generator for pretreatment
Silane evaporation system
Coat thickness measuring device